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 LED Inspection |
 Home > Products > LED Inspection |
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 AVIS-5000n |
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| Item |
Description |
Inspected
products |
2~ 6” LED wafer |
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Resolution |
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2 inch |
4 inch |
6 inch |
Inspection
Speed
(Whole Wafer
Inspection) |
0.35㎛
@pixel |
1camera |
5.0min. |
10.0min. |
20.0min. |
| 2camera |
3.5min. |
7.0min. |
15.0min. |
0.7㎛
@pixel |
1camera |
2.0min. |
5.0min. |
10.0min. |
| 2camera |
1.5min. |
3.0min. |
6.5min. |
1.4㎛
@pixel |
1camera |
1.5min. |
4.0min. |
7.0min. |
| 2camera |
1.2min. |
2.5min. |
4.0min. |
| Illumination |
Bright Field + (Dark Field) |
| Auto-focus |
ADS sensor (Repeatability: 2um@3σ) |
| NG |
Defect map, SPC |
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