IC Package substrate

AVIS-1800plus
BOC/CSP/UTC/SiP AFVI/FC CSP

ICパッケージ基質用自動ビジョン検査システム

一般特長
Item 特長
Vision system Camera: 8K linescan CCD camera (TDI type: Time Delay Interface 方式)
Resolution: 2 / 2.5 / 5.6 μm/pixel (解像度の交換時 Lens / 鏡筒手動交換方式)
Minimum defect size: 6 / 7.5 / 16.8 μm
Inspected products Type: BOC, CSP, UTC, SiP, PBGA, MMC, FC-CSP (Non-SOP) FC CSP (SOP) : 間紙使用
Size: (W)30~120mm, (L)150~270mm, (T)0.06mm and above
Surface finish: Soft Au, ENIG, OSP(=Flux), Hard Gold
Productivity
(断面検査、Open scan時、生産性変動)
Pad 検査時 Tact time (2 / 2.5 / 5.6 µm) :
   45 mm : 15 / 13 / 7 sec
   60 mm : 19 / 13 / 9 sec
   90 mm : 25 / 19 / 9 sec
Pad + PSR 検査時 Tact time (2/ 2.5 / 5.6 µm) :
   45 mm : 25 / 21 / 9 sec
   60 mm : 31 / 21 / 13 sec
   90 mm : 44 / 35 / 13 sec (最終目標 30 / 12sec目標)
Size (W)1850 x (D)1655 x (H)1760mm, Weight: 2.2ton
Power AC 220v, single phase, Consumption: 4kw/h
Control PC based motion control
Air 4~6kg/cm2, consumption: 1200liter/min.

主要機能
Item Specification Remarks
Scan width FOV 16mm @ 2.0 um resolution
FOV 20mm @ 2.5 um resolution
FOV 45mm @ 5.6um resolution
Double scan function
Particle control Dust Clean Roller
静電気を利用したクリーンローラー異物除去方式適用
Light control Automatic illumination calibration function
Auto focus Auto focus function
Teach procedure Less than 90minutes for Metal inspection
Less than 120minutes for Metal + SR inspection
Off-line Server Off-line server minimize machine down-time
Multiple AFVI can share one teach file
SPC SPC function is available